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Growth coalescence shapes for islands during metal (100) homoepitaxy

机译:金属(100)同质外延过程中岛的生长聚结形状

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摘要

During submonolayer homoepitaxy, instability in the shapes of growing two-dimensional islands can develop due to the diffusion-limited aggregation of deposited adatoms at their edges. However, in metal (100) systems, periphery diffusion is typically efficient, quenching this shape instability, and resulting in simple near-square or near-rectangular shapes of isolated islands. Despite this feature, growth coalescence shapes resulting from collision of two or more growing islands are nontrivial. These coalescence shapes are elucidated here by developing three complementary formulations: (i) suitable atomistic lattice-gas models analyzed by kinetic Monte Carlo simulation; (ii) deterministic rate equations for the dynamics of kinks along island step edges; and (iii) continuum theories for step-edge evolution. Characterization of coalescence shapes is important as they affect interlayer transport during multilayer growth. Such a characterization is also necessary to enable coarse-grained modeling of film growth with a realistic treatment of the evolution of island edge morphologies, e.g., using level-set methods.
机译:在亚单层同质外延过程中,由于沉积的原子在其边缘处的扩散受限聚集,可能会发展成二维岛状形状的不稳定性。但是,在金属(100)系统中,外围扩散通常非常有效,可以消除这种形状不稳定性,并导致孤立岛的简单近方形或近矩形形状。尽管具有此功能,但由于两个或多个正在生长的岛的碰撞而导致的生长聚结形状并不重要。通过开发三种互补的公式,可以阐明这些聚结形状: (ii)沿孤岛台阶边缘的扭结动力学的确定性速率方程; (iii)逐步进化的连续理论。聚结形状的表征很重要,因为它们会影响多层生长过程中的层间传输。这种表征对于使膜生长的粗粒度建模具有现实意义,例如通过使用水平集方法对岛边缘形态的演变进行实际处理也是必要的。

著录项

  • 作者

    Li, Maozhi; Evans, James W.;

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  • 年度 2004
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  • 原文格式 PDF
  • 正文语种 en
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